CCIT test

The preliminary model calculation, was executed by using containers from Set N. Each of these containers, underwent 32 successive tests, thus determining the conformity range. The deflections average values μij and standard deviation Δij, were then calculated for each Cij cell, as well as the maximum (THR+) and minimum (THR-) thresholds. This phase, allowed to determine both the best parameter setting for the time periods of the various phases (Tz z=1..4) and the reference value (K) for calculating the results of CCIT.

Specifically, the information derived from carrying out the model calculation, indicated the need to set K = 2.5.

Subsequently, it was decided to conduct four distinct analyses, varying the total cycle time, T0. After identifying the suitable vacuum level conditions (congruent with the need to maintain the quality of the lid and not generate further integrity defects) and the relevant time periods for vacuum generation, change and maintenance, only the time required for stabilization (T2) was varied. Therefore, all other times were kept constant, except for the F03 recipe in which, in addition to T2, the T3  time was reduced (Table B).

Each of the analyses, was carried out within one day, taking into account a set of specific recipe parameters, respectively.

 

Table B. Recipes

Recipe ID

Set

T1 (sec)

T2 (sec)

T3 (sec)

T4 (sec)

T0 (sec)

V0 (mbar)

V1 (mbar)

K

F04

P_5 P_10 P_15 P_20

5

51

3

1

60

750

400

2.5

F02

P_15 P_20

5

11

3

1

20

750

400

2.5

F01

P_10

5

21

3

1

30

750

400

2.5

F03

P_55 P_100   P_250

5

2.5

1.5

1

10

750

400

2.5

Ten CCIT cycles, were then carried out in a round-robin sequence, for each container relating to each of the P sets involved. The round-robin method, was selected to ensure that a time interval of more than five minutes was left between two successive CCIT cycles on the same container. This made it possible, for each container examined, to reestablish the relative nominal conditions to precede the next reuse, in other words the recovery of lid deflection induced by the vacuum during the CCIT cycle.

The determination of the results, was then conditioned by the following rules:

  1. the failure to detect a defect represents a false negative
  2. the detection of a defect in a Cij cell without a hole represents a false positive
  3. the detection of a defect in a Cij cell without a hole, that is 100% systematic in subsequent tests, is not considered a false positive. It is assumed that, if a defect is detected in a generic, non-drilled Cij cell in all CCIT cycles specified, it is truly defective.  This behavior, was observed in the P_15 set in which two non-drilled Cij cells produced non-conforming results
  4. notwithstanding the details of the previous point, the “false positives” indicator is the sum of the individual Cij cells for which a non-conforming result is obtained in each individual CCIT cycle.

Summary of results

The results of the four distinct analyses carried out, are given in the following tables, ordered according to the CCIT cycle time:

Table C – T0 = 60 sec.

Table D – T0 = 30 sec.

Table E – T0 = 20 sec.

Table F – T0 = 10 sec.

 

Table C. Report of results for the F04 recipe


Set ID

Hole (µm)

Detection of defect (%)

False positive rate (%)

False negative rate (%)

Sigma level

Reliability of the defects   detection process (%)

P_5

5

100

1.33

0

3.4

99.93

P_10

10

100

2.44

0

3.5

99.95

P_15

15

100

2.22

0

4.9

1-(9E-04)

P_20

20

100

1.56

0

11.3

100

 

Table D. Report of results for the F01 recipe


Set ID

Hole (µm)

Detection   of defect (%)

False   positive rate (%)

False   negative rate (%)

Sigma   level

Reliability of the defects   detection process (%)

P_10

10

98

0.89

2.00

2.9

99.63

 

Table E. Report of results for the F02 recipe


Set ID

Hole (µm)

Detection of defect (%)

False positive rate (%)

False negative rate (%)

Sigma level

Reliability of the defects   detection process (%)

P_15

15

100

0

0

5.9

1-(4E-08)

P_20

20

100

0

0

6.3

1-(3E-08)

 

Table F. Report of results for the F03 recipe


Set ID

Hole (µm)

Detection of defect (%)

False positive rate (%)

False negative rate (%)

Sigma   level

Reliability of the defects   detection process (%)

P_55

55

100

0

0

12

100

P_100

100

100

0

0

12

100

P_250

250

100

0

0

12

100

 

It is deduced that:

increasing the length of the cycle, and specifically increasing T2, gives the following results:

  • a decrease in false negatives, in general a longer test period allows better detection of defects
  • an increase in false positives

increasing the diameter of the hole gives the following results:

  • an increase in the Sigma level and therefore in the reliability of the defect detection process.

Having considered the worst case scenario, in the context of implementing positive controls, in other words, having used containers for which the defect is positioned adjacent S_ACQ when performing CCIT, implies that the performance of the measuring system can be greater than those resulted in the case study.